Russian researchers from the Institute of Nuclear Physics GI Budker (BINP) SB RAS at Zelenograd plan to create a prototype ion accelerator and a technological storage complex for the production of microelectronics. This was reported by TASS Institute director Pavel Logachev.
The storage complex will be used to create, test and use lithographs required for the production of microcircuits. In 1990-1991, BINP SB RAS was already creating a complex that was not launched due to the collapse of the USSR, but scientists plan to restore it within three years. Creating a TNC from scratch will cost about 10 billion rubles, and restoration will require half a billion rubles.
The project will also create an industrial ion accelerator for the domestic implanter that will introduce the necessary chemical elements into the semiconductor wafer to the required depth to create microcircuits. The prototype of the facility will be produced within three years. Funding for the project will come from various sources, including the Ministry of Industry and Trade of the Russian Federation, the Kurchatov Institute and the Moscow government.
The aim of the project is to create a domestic technology chain for microelectronics production and to make completely domestic equipment for this sector.
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