If the roadmap of the IPM RAS and the National Center for Physics and Mathematics is approved, domestic lithography production will begin in Russia by 2030. This was told socialbites.ca by the lead developer of a groundbreaking domestic lithography, created with the participation of scientific cooperation of the National Center for Physics and Mathematics (NTsFM), head of the department of multilayer X-ray optics at the Institute. Microstructural Physics (IPM) of the Russian Academy of Sciences Nikolai Chkhalo.
“As part of this roadmap, we are dedicating 2 years for the first phase, which is the creation of critical technologies for X-ray lithography. This means that the alpha machine will be built within two years of starting the business. On it, we hope to immediately get the resolution of the projection lens 32-28 nm in two years. We will already test all the main elements of lithography on a real scale. It’s a short while, but we’ll do it,” said Chkhalo.
According to him, the second phase will take two years. Within its framework, the scientists plan to create a beta machine that pulls chips, currently focused on mass production.
“It will also have a resolution of up to 28 nm. At ASML (the Dutch company that designed the most advanced lithographs), the machine-to-manufacturing integration took about six years. It is assumed that this machine will go through all the stages of integration on the line, maybe be used somewhere, and the production of working lithographs will begin by 2030. This lithograph will be able to produce 28 nm and then 14 nm and 12 nm chips. So these are pretty modern dimensions,” said Chkhalo.
About how long ago it was forbidden to sell advanced equipment for printing microcircuits in Russia, which produces advanced lithographs in the world, and how Russia lags behind world trends – report “socialbites.ca”.